Tribology in CMP processes: Material removal mechanism in CMP processes

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Graduate School of Computer Science and System Engineering, Kyushu Institute of Technology, 680-4, Kawazu, Iizuka-shi, Fukuoka 820-8502 [1 ]
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J Jpn Soc Tribol | 2009年 / 2卷 / 109-115期
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页码：109 / 115
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