Thermal conductivity of Si/SiGe superlattice films

被引：0

作者：

Liu, Chun-Kai ^{[1
]}

Yu, Chih-Kuang ^{[1
]}

Chien, Heng-Chieh ^{[1
]}

Kuo, Sheng-Liang ^{[1
]}

Hsu, Chung-Yen ^{[1
]}

Dai, Ming-Ji ^{[1
]}

Luo, Guang-Li ^{[2
]}

Huang, Shih-Chiang ^{[2
]}

Huang, Mei-Jiau ^{[3
]}

机构：

[1] Electronics and Optoelectrics Research Laboratories, Industrial Technology Research Institute, 310 Hsinchu, Taiwan

[2] National Nano Device Laboratories, 300 Hsinchu, Taiwan

[3] Department of Mechanical Engineering, National Taiwan University, 106 Taipei, Taiwan

来源：

Journal of Applied Physics | 2008年 / 104卷 / 11期

关键词：

35;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

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