Decreasing of the thermal conductivity of Si nanopillar/SiGe composite films investigated by using a piezoelectric photothermal spectroscopy

被引:3
|
作者
Harada, Tomoki [1 ]
Aki, Tsubasa [1 ]
Ohori, Daisuke [2 ]
Samukawa, Seiji [2 ,3 ]
Ikari, Tetsuo [1 ]
Fukuyama, Atsuhiko [1 ]
机构
[1] Univ Miyazaki, 1-1 Gakuen Kibanadainishi, Miyazaki, Miyazaki 8892192, Japan
[2] Tohoku Univ, Inst Fluid Sci, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
[3] Tohoku Univ, Adv Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
基金
日本学术振兴会;
关键词
THERMOELECTRIC PERFORMANCE; SILICON; TRANSPORT;
D O I
10.35848/1347-4065/ab82a6
中图分类号
O59 [应用物理学];
学科分类号
摘要
To investigate the decrease of thermal conductivity (kappa) of nanoscale Si materials, we conducted the piezoelectric photothermal (PPT) method for the highly periodic Si nanopillar arrays embedded in Si0.7Ge0.3. The PPT is an electrode free method that can measure a heat propagation in the parallel to the nanopillars direction. A distinctive dip was observed in the frequency-dependent PPT signal intensity. By focusing the dip frequency, kappa was estimated from the comparison with the model analysis based on the one-dimensional multilayer thermal diffusion equation. The estimated kappa was 0.19 +/- 0.07 W m(-1) K, in the parallel to the nanopillars direction. Since the considerable decrease of kappa was confirmed from the non-radiative recombination point of view, we found the present non-destructive PPT method is very useful to estimate kappa in the nanostructured devices for the thermoelectric application. (C) 2020 The Japan Society of Applied Physics
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页数:5
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共 39 条
  • [1] Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method
    Harada, Tomoki
    Ohori, Daisuke
    Endo, Kazuhiko
    Samukawa, Seiji
    Ikari, Tetsuo
    Fukuyama, Atsuhiko
    [J]. JOURNAL OF APPLIED PHYSICS, 2023, 133 (12)
  • [2] Thermal conductivity of Si/SiGe superlattice films
    Liu, Chun-Kai
    Yu, Chih-Kuang
    Chien, Heng-Chieh
    Kuo, Sheng-Liang
    Hsu, Chung-Yen
    Dai, Ming-Ji
    Luo, Guang-Li
    Huang, Shih-Chiang
    Huang, Mei-Jiau
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (11)
  • [3] Thermal conductivity of Si/SiGe superlattice films
    Liu, Chun-Kai
    Yu, Chih-Kuang
    Chien, Heng-Chieh
    Kuo, Sheng-Liang
    Hsu, Chung-Yen
    Dai, Ming-Ji
    Luo, Guang-Li
    Huang, Shih-Chiang
    Huang, Mei-Jiau
    [J]. Journal of Applied Physics, 2008, 104 (11):
  • [4] Temperature dependence of the optical gap of diamond-like carbon films investigated by a piezoelectric photothermal spectroscopy
    Ding, Wen
    Nakano, Yosuke
    Yamamoto, Ryoichi
    Sakai, Kentaro
    Nakazawa, Hideki
    Fukuyama, Atsuhiko
    Ikari, Tetsuo
    [J]. EUROPEAN MATERIALS RESEARCH SOCIETY CONFERENCE SYMPOSIUM: ADVANCED INORGANIC MATERIALS AND CONCEPTS FOR PHOTOVOLTAICS, 2011, 10
  • [5] Near band edge non-radiative recombination of Si single crystal investigated by piezoelectric photothermal spectroscopy
    [J]. Memon, A.A. (aftab@pem.miyazaki-u.ac.jp), 1600, Japan Society of Applied Physics (42):
  • [6] Near band edge non-radiative recombination of Si single crystal investigated by piezoelectric photothermal spectroscopy
    Memon, AA
    Fukuyama, A
    Ikari, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (2A): : 358 - 362
  • [7] Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method
    Shen, Binjie
    Zeng, Zhigang
    Lin, Cong
    Hu, Zhiyu
    [J]. INTERNATIONAL JOURNAL OF THERMAL SCIENCES, 2013, 66 : 19 - 23
  • [8] Measurement of the Thermal Conductivity of Si and GaAs Wafers Using the Photothermal Displacement Technique
    J. H. Kim
    D. Seong
    G. H. Ihm
    C. Rhee
    [J]. International Journal of Thermophysics, 1998, 19 : 281 - 290
  • [9] Measurement of the thermal conductivity of Si and GaAs wafers using the photothermal displacement technique
    Kim, JH
    Seong, D
    Ihm, GH
    Rhee, C
    [J]. INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1998, 19 (01) : 281 - 290
  • [10] Thermal conductivity of PVD TiAlN films using pulsed photothermal reflectance technique
    Xing-Zhao Ding
    M. K. Samani
    George Chen
    [J]. Applied Physics A, 2010, 101 : 573 - 577