Thermal conductivity of Si/SiGe superlattice films

被引：0
|
作者：
Liu, Chun-Kai [1 ]
Yu, Chih-Kuang [1 ]
Chien, Heng-Chieh [1 ]
Kuo, Sheng-Liang [1 ]
Hsu, Chung-Yen [1 ]
Dai, Ming-Ji [1 ]
Luo, Guang-Li [2 ]
Huang, Shih-Chiang [2 ]
Huang, Mei-Jiau [3 ]
机构：
[1] Electronics and Optoelectrics Research Laboratories, Industrial Technology Research Institute, 310 Hsinchu, Taiwan
[2] National Nano Device Laboratories, 300 Hsinchu, Taiwan
[3] Department of Mechanical Engineering, National Taiwan University, 106 Taipei, Taiwan
来源：
Journal of Applied Physics | 2008年 / 104卷 / 11期
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