Improvement of uneven color of TiN films deposited by arc discharge ion plating

被引：0
|
作者：
Suzuki, Akira [1 ]
机构：
[1] Nihon Seimitsu Co, Ltd, Saitama, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 6 A期
关键词：
Arc discharge ion plating;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3603 / 3604
相关论文
共 50 条
  • [31] Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating
    Yan-Hui Zhao
    Wen-Jin Yang
    Chao-Qian Guo
    Yu-Qiu Chen
    Bao-Hai Yu
    Jin-Quan Xiao
    Acta Metallurgica Sinica (English Letters), 2015, 28 : 984 - 993
  • [32] Investigation on CNx films deposited by pulsed bias arc ion plating
    Li Hong-Kai
    Lin Guo-Qiang
    Dong Chuang
    ACTA PHYSICA SINICA, 2008, 57 (10) : 6636 - 6642
  • [33] Synthesis and properties of CeN thin films deposited by arc ion plating
    Xiao, SQ
    Tsuzuki, K
    Sugimura, H
    Takai, O
    JOURNAL OF MATERIALS SCIENCE, 1998, 33 (13) : 3251 - 3254
  • [34] Synthesis and properties of CeN thin films deposited by arc ion plating
    Nagoya Univ, Nagoya, Japan
    J Mater Sci, 13 (3251-3254):
  • [35] Synthesis and properties of CeN thin films deposited by arc ion plating
    S. Q. Xiao
    K. Tsuzuki
    H. Sugimura
    O. Takai
    Journal of Materials Science, 1998, 33 : 3251 - 3254
  • [36] Oxidition resistance of multi-arc ion plating TiN Films
    Wang, Jie
    Jiang, Shihang
    Wang, JuanJuan
    MECHATRONICS AND INTELLIGENT MATERIALS III, PTS 1-3, 2013, 706-708 : 180 - 183
  • [37] Ion beam measurements for the investigation of TiN thin films deposited on different substrates by vacuum arc discharge
    Abdallah, B.
    Rihawy, M. S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 441 : 33 - 40
  • [38] Effects of modulation period on microstructure, mechanical properties of TiBN/TiN nanomultilayered films deposited by multi arc ion plating
    Zhou, S. Y.
    Pelenovich, V. O.
    Han, B.
    Yousaf, M. I.
    Yan, S. J.
    Tian, C. X.
    Fu, D. J.
    VACUUM, 2016, 126 : 34 - 40
  • [39] The corrosion resistance and wear resistance of thick TiN coatings deposited by arc ion plating
    Lang, FQ
    Yu, ZM
    SURFACE & COATINGS TECHNOLOGY, 2001, 145 (1-3): : 80 - 87
  • [40] Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge
    Terasako, T.
    Song, H.
    Makino, H.
    Shirakata, S.
    Yamamoto, T.
    THIN SOLID FILMS, 2013, 528 : 19 - 25
12345