Improvement of uneven color of TiN films deposited by arc discharge ion plating

被引：0
|
作者：
Suzuki, Akira [1 ]
机构：
[1] Nihon Seimitsu Co, Ltd, Saitama, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 6 A期
关键词：
Arc discharge ion plating;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：3603 / 3604
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