Measurement of line width roughness by using atomic force microscope

被引：0
|
作者：
Li, Hongbo [1 ]
Zhao, Xuezeng [1 ]
机构：
[1] School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001, China
来源：
Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering | 2008年 / 44卷 / 08期
关键词：
D O I：
10.3901/JME.2008.08.227
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：227 / 232
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