In Situ Roughness Measurements for the Solar Cell Industry Using an Atomic Force Microscope

被引:5
|
作者
Gonzalez-Jorge, Higinio [1 ]
Alvarez-Valado, Victor [2 ]
Luis Valencia, Jose [2 ]
Torres, Soledad [2 ]
机构
[1] Univ Vigo, Dept Ingn Recursos Nat & Medioambiente, ETS Ingn Minas, Vigo 36310, Spain
[2] Lab Oficial Metrol Galicia, Dept I D, San Cibrao Das Vinas 32901, Ourense, Spain
来源
SENSORS | 2010年 / 10卷 / 04期
关键词
surface metrology; atomic force microscopy; solar cell; transparent conductive oxide; areal roughness;
D O I
10.3390/s100404002
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Areal roughness parameters always need to be under control in the thin film solar cell industry because of their close relationship with the electrical efficiency of the cells. In this work, these parameters are evaluated for measurements carried out in a typical fabrication area for this industry. Measurements are made using a portable atomic force microscope on the CNC diamond cutting machine where an initial sample of transparent conductive oxide is cut into four pieces. The method is validated by making a comparison between the parameters obtained in this process and in the laboratory under optimal conditions. Areal roughness parameters and Fourier Spectral Analysis of the data show good compatibility and open the possibility to use this type of measurement instrument to perform in situ quality control. This procedure gives a sample for evaluation without destroying any of the transparent conductive oxide; in this way 100% of the production can be tested, so improving the measurement time and rate of production.
引用
收藏
页码:4002 / 4009
页数:8
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