Analysis research of undercutting phenomenon in wet anisotropic etching process

被引：0

作者：

Zhang, Han ^{[1
]}

Li, Weihua ^{[1
]}

机构：

[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China

来源：

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2010年 / 31卷 / 04期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：944 / 950

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