Nano-indentation hardness and elastic moduli of bulk single-crystal AlN

被引:0
|
作者
Yonenaga, Ichiro [1 ]
Shima, Toshiyuki [1 ]
Sluiter, Marcel H.F. [1 ]
机构
[1] Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
关键词
Continuous depth-sensing mode - Load-displacement curve - Nano-indentation hardness - Single crystal aluminum nitride;
D O I
10.1143/jjap.41.4620
中图分类号
学科分类号
摘要
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页码:4620 / 4621
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