Nano-indentation hardness and elastic moduli of bulk single-crystal AlN

被引：0
|
作者：
Yonenaga, Ichiro [1 ]
Shima, Toshiyuki [1 ]
Sluiter, Marcel H.F. [1 ]
机构：
[1] Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 7 A期
关键词：
Continuous depth-sensing mode - Load-displacement curve - Nano-indentation hardness - Single crystal aluminum nitride;
D O I：
10.1143/jjap.41.4620
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：4620 / 4621
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