Effect of sputtering power on microstructure and corrosion properties of TiO2 films deposited by reactive magnetron sputtering

被引：0

作者：

Wang, Bo ^{[1
]}

Wei, Shicheng ^{[1
]}

Guo, Lei ^{[1
]}

Wang, Yujiang ^{[1
]}

Liang, Yi ^{[1
]}

Huang, Wei ^{[2
]}

Lu, Fangjie ^{[1
]}

Chen, Xianhua ^{[3
]}

Pan, Fusheng ^{[3
]}

Xu, Binshi ^{[1
]}

机构：

[1] National Key Laboratory for Remanufacturing, Army Academy of Armored Forces, Beijing,100072, China

[2] Department of Naval Architecture Engineering, Naval University of Engineering, Wuhan,430033, China

[3] College of Materials Science and Engineering, Chongqing University, Chongqing,400045, China

来源：

Journal of Materials Research and Technology | 2022年 / 19卷

基金：

中国国家自然科学基金;

关键词：

Anti-corrosion - Anti-foulings - Antibacterial properties - Antifouling property - Corrosion property - Microstructures properties - Power - Reactive magnetron sputtering - Sputtering power - TiO 2 films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The effect of sputtering power on the microstructure, anti-corrosion and anti-fouling properties of TiO2 films deposited on 5083 aluminum (Al) alloy by reactive magnetron sputtering at room temperature were investigated systematically. The results show that the TiO2 film mainly consists of anatase, and it is composed of spherical shaped and pyramidal particles. Both the anti-corrosion and anti-bacterial properties first improve with increasing sputter power. As the power is 12 kW, the combination of anti-corrosion and anti-bacterial properties is the best, the corrosion potential (Ecorr), current density (Icorr), polarization resistance (Rp) and density of bacteria are −0.25 V, 0.36 μA/cm2, 2255.5 Ω/cm2 and 73 cell/mm2, respectively. © 2022 The Author(s)

引用

页码：2171 / 2178

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