Microstructures and properties of titanium nitride film grown by unbalanced magnetron sputtering

被引：0
|
作者：
Zhang, Qi [1 ]
Tao, Tao [1 ]
Qi, Feng [1 ]
Liu, Yanwen [1 ]
Leng, Yongxiang [1 ,2 ]
Huang, Nan [2 ]
机构：
[1] School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu 610031, China
[2] Key Lab. for Advanced Technologies of Materials, Southwest Jiaotong University, Chengdu 610031, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2007年 / 27卷 / 02期
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页码：163 / 167
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