Electrostatic field distribution measurement using MEMS micro-mirror array

被引：0
|
作者：
Kuriyama, Toshihide [1 ]
Takatsuji, Wataru [2 ]
Itoh, Takaki [2 ]
Maeda, Hiroshi [2 ]
Nakaie, Toshiyuki [3 ]
Matsui, Jun [3 ]
Miyamoto, Yoshiaki [3 ]
机构：
[1] Kuriyama, Toshihide
[2] Takatsuji, Wataru
[3] Itoh, Takaki
[4] Maeda, Hiroshi
[5] Nakaie, Toshiyuki
[6] Matsui, Jun
[7] Miyamoto, Yoshiaki
来源：
Kuriyama, Toshihide | 1600年 / Institute of Electrical Engineers of Japan卷 / 134期
关键词：
Electric fields - Electrostatics - Laser recording - Mirrors - Optical sensors - Scanning;
D O I：
10.1541/ieejsmas.134.378
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：378 / 384
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