A curled-hinge comb micro-mirror using CMO-MEMS process

被引：0
|
作者：
Huang, Y. R. [1 ]
Tai, H. M. [1 ]
Chou, H. P. [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XI | 2006年 / 6109卷
关键词：
micro-mirror; CMOS-MEMS; curled-hinge comb;
D O I：
10.1117/12.645214
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a large displacement static-electricity curled-hinge comb micro-mirror made by a CMOS-NMMS process. A micro-spring is incorporated to reduce the stress effects and the process variation. A mirror with a size of 500um x 500um is made using three metal layers. The micro-spring made a metal layer and a poly layer with a size of 4um x 21um. The nature frequency is 727 Hz and the maximum displacement of the micro-mirror is 32um using a driving voltage of 25 volts. The process variation has been successfully reduced from 30% to 10%.
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页数：6
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