Pulse breakdown characteristics of microscale gap in micro-electro-mechanical system

被引:0
|
作者
You, Xiaoguang [1 ,2 ]
Cheng, Yonghong [1 ]
Meng, Guodong [1 ]
Wu, Kai [1 ]
Meng, Yongpeng [1 ]
机构
[1] State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an 710049, China
[2] China Satellite Maritime Tracking and Controlling Department, Jiangyin 214431, China
关键词
23;
D O I
10.3788/HPLPB20132507.1867
中图分类号
学科分类号
摘要
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页码:1867 / 1872
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