Pulse breakdown characteristics of microscale gap in micro-electro-mechanical system

被引:0
|
作者
You, Xiaoguang [1 ,2 ]
Cheng, Yonghong [1 ]
Meng, Guodong [1 ]
Wu, Kai [1 ]
Meng, Yongpeng [1 ]
机构
[1] State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an 710049, China
[2] China Satellite Maritime Tracking and Controlling Department, Jiangyin 214431, China
关键词
23;
D O I
10.3788/HPLPB20132507.1867
中图分类号
学科分类号
摘要
引用
收藏
页码:1867 / 1872
相关论文
共 50 条
  • [21] Design Automation for Micro-Electro-Mechanical Systems
    Kriebel, David
    Schmidt, Henry
    Schiebold, Michael
    Freitag, Markus
    Arnold, Benjamin
    Naumann, Michael
    Mehner, Jan. E.
    CAS 2018 PROCEEDINGS: 2018 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 2018, : 43 - 50
  • [22] Optical characterization of micro-electro-mechanical structures
    Annovazzi-Lodi, V
    Benedetti, M
    Merlo, S
    Norgia, M
    Vigna, B
    Sassolini, S
    OPTICAL MICRO- AND NANOMETROLOGY IN MANUFACTURING TECHNOLOGY, 2004, 5458 : 196 - 207
  • [23] Quantum control spectroscopy (QCS) with a micro-electro-mechanical system (MEMS)
    Buckup, T.
    Moehring, J.
    Motzkus, M.
    MEMS ADAPTIVE OPTICS III, 2009, 7209
  • [24] Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films
    Y. Yang
    S. Allameh
    J. Lou
    B. Imasogie
    B.L. Boyce
    W.O. Soboyejo
    Metallurgical and Materials Transactions A, 2007, 38 : 2340 - 2348
  • [25] Examination of a micro-electro-mechanical system based on a portable respiratory monitoring system
    Sung, Jiwon
    Yoon, Myonggeun
    Do Huh, Hyun
    Shin, Dong Oh
    Chung, Weon Kuu
    Kim, Dong Wook
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2015, 67 (04) : 752 - 756
  • [26] Development of micro-electro-mechanical optical scanner
    Motamedi, ME
    Park, S
    Wang, AH
    Dadkhah, MS
    Andrews, AP
    Marcy, HO
    Khoshnevisan, M
    Chiou, AE
    Huhn, RJ
    Sell, CF
    Smits, JG
    OPTICAL ENGINEERING, 1997, 36 (05) : 1346 - 1353
  • [27] Micro-electro-mechanical (MEM) diode switch
    Acquaviva, D.
    Bouvet, D.
    Tsamados, D.
    Coronel, P.
    Skotnicki, T.
    Ionescu, A. M.
    MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 1074 - 1077
  • [29] Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system
    Ha, T
    Kwon, O
    Kim, J
    Oh, J
    Won, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S676 - S680
  • [30] Design and fabrication of an electrostatic variable gap comb drive in micro-electro-mechanical systems
    Ye, WJ
    Mukherjee, S
    CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES, 2000, 1 (01): : 111 - 120