Low-temperature formation of Si(001) 2×1 surfaces from wet chemical cleaning in NH4F solution

被引：29
|
作者：
Le, Thanh, Vinh
Bouchier, D.
Hincelin, G.
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来源：
Journal of Applied Physics | 2000年 / 87卷 / 08期
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D O I：
10.1063/1.372403
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