Strong room temperature photoluminescence of a-SiNx:H films

被引：0
|
作者：
Yue, Ruifeng [1 ]
Wang, Yan [1 ]
Li, Guohua [2 ]
Liao, Xianbo [3 ]
Wang, Yongqian [3 ]
Diao, Hongwei [3 ]
Kong, Guanglin [3 ]
机构：
[1] Inst. of Microelectron., Tsinghua Univ., Beijing 100084, China
[2] Lab. for Superlattices, Inst. of Semiconduct., Chinese Acad. of Sci., Beijing 100083, China
[3] Lab. for Surface Phys., Inst. of Semiconduct., Chinese Acad. of Sci., Beijing 100083, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology | 2000年 / 20卷 / 06期
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摘要：
18
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页码：390 / 393
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