共 50 条
- [34] Advances in lithography technologies for wafer-level packaging FIFTH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, PROCEEDINGS, 2003, : 126 - 129
- [35] Ceramic via wafer-level packaging for MEMS ADVANCES IN ELECTRONIC PACKAGING 2005, PTS A-C, 2005, : 1069 - 1074
- [36] Vacuum wafer-level packaging for MEMS applications MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII, 2003, 4979 : 271 - 278
- [37] Trends in Wafer-level Packaging of MEMS: MEMS Packaging Solutions Advanced Packaging, 2004, 13 (04): : 25 - 27
- [39] Wafer-level packaging of MEMS accelerometers with through-wafer interconnects 55TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, VOLS 1 AND 2, 2005 PROCEEDINGS, 2005, : 320 - 323
- [40] Embedded Wafer-level Microfluidic Cooling Designs for The System on Wafer Packaging 2023 24TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT, 2023,