Fabrication of perovskite-based high-value integrated capacitors by chemical solution deposition

被引：0
|
作者：
Sigman, Jennifer [1 ]
Brennecka, Geoffrey L. [1 ]
Clem, Paul G. [1 ]
Tuttle, Bruce A. [1 ]
机构：
[1] Sandia National Laboratories, Albuquerque, NM 87185, United States
来源：
Journal of the American Ceramic Society | 2008年 / 91卷 / 06期
关键词：
Electric fields - Perovskite - Chemicals - Thin films - Barium strontium titanate - Strontium titanates - Fabrication - Ferroelectric ceramics - Capacitance - Film preparation - Deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：1851 / 1857
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