Fabrication of perovskite-based high-value integrated capacitors by chemical solution deposition

被引:0
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作者
Sigman, Jennifer [1 ]
Brennecka, Geoffrey L. [1 ]
Clem, Paul G. [1 ]
Tuttle, Bruce A. [1 ]
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[1] Sandia National Laboratories, Albuquerque, NM 87185, United States
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关键词
Electric fields - Perovskite - Chemicals - Thin films - Barium strontium titanate - Strontium titanates - Fabrication - Ferroelectric ceramics - Capacitance - Film preparation - Deposition;
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页码:1851 / 1857
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