Transparent TiN electrodes in GaN metal-semiconductor-metal ultraviolet photodetectors

被引：0
|
作者：
Chiou, Yu-Zung [1 ,2 ]
Su, Yan-Kuin [1 ,2 ]
Chang, Shoou-Jinn [1 ,2 ]
Chen, Jone F. [1 ,2 ]
Chang, Chia-Sheng [1 ,2 ]
Liu, Sen-Hai [1 ,2 ]
Lin, Yi-Chao [1 ,2 ]
Chen, Chin-Hsiang [1 ,2 ]
机构：
[1] Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan
[2] South Epitaxy Corporation, Hsin-Shi, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 A期
关键词：
Contact electrodes - Ultraviolet photodetector;
D O I：
10.1143/jjap.41.3643
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3643 / 3645
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