Growth of al-doped ZnO films by mid frequency DC magnetron sputtering

被引：0
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作者：
Lin, Qinggeng [1 ,2 ]
Gao, Xiaoyong [1 ]
Liu, Yufen [1 ]
Lu, Jingxiao [1 ]
机构：
[1] The Key Lab of Materials Physics of Ministry of Education, Zhengzhou University, Zhengzhou 450052, China
[2] School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2008年 / 28卷 / 06期
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页码：566 / 569
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