Preparation of CNx films using unbalanced magnetron sputtering deposition

被引：0
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作者：
Gao, P. [1 ]
Liu, C. [1 ]
Wu, D. [1 ]
Peng, Y. [1 ]
Fan, X. [1 ]
机构：
[1] School of Physics and Technology, Wuhan University, Wuhan 430072, Hubei, China
来源：
Wuhan Daxue Xuebao/Journal of Wuhan University | 2001年 / 47卷 / 01期
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页码：99 / 102
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