Computer simulation of reactive sputtering

被引：0
|
作者：
Zhu, Shenglong [1 ]
Wang, Fuhui [1 ]
Wu, Weitao [1 ]
Xin, Li [1 ]
Hu, Chuanshun [1 ]
Yang, Songlan [1 ]
Geng, Shujiang [1 ]
Li, Mingsheng [1 ]
Xiong, Yuming [1 ]
Chen, Kewei [1 ]
机构：
[1] State Key Lab. Corrosion Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China
来源：
International Journal of Materials and Product Technology | 2001年 / SPEC. ISS. VOL.1期
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页码：101 / 106
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