Computer simulation of reactive sputtering

被引：0

作者：

Zhu, Shenglong ^{[1
]}

Wang, Fuhui ^{[1
]}

Wu, Weitao ^{[1
]}

Xin, Li ^{[1
]}

Hu, Chuanshun ^{[1
]}

Yang, Songlan ^{[1
]}

Geng, Shujiang ^{[1
]}

Li, Mingsheng ^{[1
]}

Xiong, Yuming ^{[1
]}

Chen, Kewei ^{[1
]}

机构：

[1] State Key Lab. Corrosion Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China

来源：

International Journal of Materials and Product Technology | 2001年 / SPEC. ISS. VOL.1期

关键词：

D O I：

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中图分类号：

学科分类号：

摘要：

引用

页码：101 / 106

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