Computer simulation of reactive sputtering

被引：0

作者：

Zhu, Shenglong ^{[1
]}

Wang, Fuhui ^{[1
]}

Wu, Weitao ^{[1
]}

Xin, Li ^{[1
]}

Hu, Chuanshun ^{[1
]}

Yang, Songlan ^{[1
]}

Geng, Shujiang ^{[1
]}

Li, Mingsheng ^{[1
]}

Xiong, Yuming ^{[1
]}

Chen, Kewei ^{[1
]}

机构：

[1] State Key Lab. Corrosion Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China

来源：

International Journal of Materials and Product Technology | 2001年 / SPEC. ISS. VOL.1期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：101 / 106

共 50 条

[1] Computer simulation of reactive sputtering
Zhu, SL
Wang, FH
Wu, WT
Xin, L
Hu, CS
Yang, SL
Geng, SJ
Li, MS
Xiong, YM
Chen, KW
INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY, 2001, : 101 - 106
[2] Experimental and computer simulation studies of the "baffled target" reactive sputtering process
Engelmark, F
Westlinder, J
Nyberg, T
Berg, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (06): : 1981 - 1987
[3] COMPUTER SIMULATION OF SPUTTERING
OSTRY, D
MACDONALD, RJ
PHYSICS LETTERS A, 1970, A 32 (05) : 303 - +
[4] COMPUTER SIMULATION OF SPUTTERING
HARRISON, DE
LEVY, NS
JOHNSON, JP
EFFRON, HM
JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) : 3742 - &
[5] COMMENTS ON COMPUTER SIMULATION OF SPUTTERING
ROBINSON, MT
JOURNAL OF APPLIED PHYSICS, 1969, 40 (06) : 2670 - &
[6] Computer simulation of the sputtering process
Eckstein, Wolfgang
Urbassek, Herbert M.
SPUTTERING BY PARTICLE BOMBARDMENT: EXPERIMENTS AND COMPUTER CALCULATIONS FROM THRESHOLD TO MEV ENERGIES, 2007, 110 : 21 - 31
[7] ADDITIONAL INFORMATION ON COMPUTER SIMULATION OF SPUTTERING
HARRISON, DE
JOURNAL OF APPLIED PHYSICS, 1969, 40 (09) : 3870 - &
[8] Methods for Computer Simulation of Crystal Sputtering
Zykova, E. Yu.
Mosunov, A. S.
Yurasova, V. E.
COMPUTATIONAL MATHEMATICS AND MATHEMATICAL PHYSICS, 2008, 48 (10) : 1904 - 1914
[9] COMPUTER-SIMULATION OF PREFERENTIAL SPUTTERING
ECKSTEIN, W
MOLLER, W
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 727 - 734
[10] COMPUTER-SIMULATION OF SPUTTERING OF CLUSTERS
HARRISON, DE
DELAPLAIN, CB
JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) : 2252 - 2259

← 1 2 3 4 5 →