Surface texturing for wafer-bonded vertical-type GaN/mirror/Si light-emitting diodes

被引：0
|
作者：
Huang, Shao-Hua [1 ]
Horng, Ray-Hua [2 ]
Hsu, Shun-Cheng [1 ]
Chen, Tsung-Yu [3 ]
Wuu, Dong-Sing [1 ]
机构：
[1] Department of Materials Engineering, National Chung Hsing University, Taichung 402, Taiwan
[2] Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan
[3] R and D Department, Advanced Epitaxy Technology Inc., Hsinchu Industrial Park, 303, Taiwan
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 5 A卷 / 3028-3031期
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摘要：
Chemical bonds - Electron beams - Etching - Gallium nitride - Inductively coupled plasma - Light emitting diodes - Potassium compounds - Quantum efficiency - Semiconductor quantum wells - Silicon wafers - Surface roughness - Textures
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