A novel transparent conducting ZnO:Zr films deposited on ZnO-buffered flexible substrates by DC magnetron sputtering

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作者
Zhang, Hua-Fu [1 ]
Lei, Cheng-Xin [1 ]
Liu, Han-Fa [1 ]
Yuan, Chang-Kun [1 ]
机构
[1] School of Science, Shandong University of Technology, Zibo 255049, China
关键词
Dc magnetron sputtering - Electrical and optical properties - Flexible substrate - Hexagonal structures - High transmittance - High transparency - Transparent conducting films - Wavelength ranges;
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页码:732 / 737
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