A novel transparent conducting ZnO:Zr films deposited on ZnO-buffered flexible substrates by DC magnetron sputtering

被引：0
|
作者：
Zhang, Hua-Fu [1 ]
Lei, Cheng-Xin [1 ]
Liu, Han-Fa [1 ]
Yuan, Chang-Kun [1 ]
机构：
[1] School of Science, Shandong University of Technology, Zibo 255049, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2009年 / 38卷 / 03期
关键词：
Dc magnetron sputtering - Electrical and optical properties - Flexible substrate - Hexagonal structures - High transmittance - High transparency - Transparent conducting films - Wavelength ranges;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：732 / 737
相关论文
共 50 条
  • [31] PROPERTIES OF TRANSPARENT, CONDUCTING ZNO FILMS DEPOSITED BY REACTIVE BIAS SPUTTERING
    BRETT, MJ
    PARSONS, RR
    SOLID STATE COMMUNICATIONS, 1985, 54 (07) : 603 - 606
  • [32] Structural characterization of ZnO thin films deposited by dc magnetron sputtering
    Kiriakidis, G.
    Suchea, M.
    Christoulakis, S.
    Horvath, P.
    Kitsopoulos, T.
    Stoemenos, J.
    THIN SOLID FILMS, 2007, 515 (24) : 8577 - 8581
  • [33] TRANSPARENT CONDUCTING INDIUM DOPED ZNO FILMS BY DC REACTIVE S-GUN MAGNETRON SPUTTERING
    YE, ZZ
    TANG, JF
    APPLIED OPTICS, 1989, 28 (14): : 2817 - 2819
  • [34] Preparation and character of ZnO:Al transparent conductive films deposited on polymer substrates by RF magnetron sputtering
    Xiao-Jing, Wang
    De-Jun, Li
    Jun, Wang
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2011, 5 (10): : 1111 - 1114
  • [35] Al:ZnO films deposited on flexible transparent polyimide substrate by magnetron sputtering at different substrate temperatures
    Li, Weimin
    Hao, Huiying
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2012, 6 (1-2): : 117 - 120
  • [36] Transparent and conducting ZnO(:Al) films deposited by simultaneous RF- and DC-excitation of a magnetron
    Ellmer, K
    Cebulla, R
    Wendt, R
    THIN SOLID FILMS, 1998, 317 (1-2) : 413 - 416
  • [37] Transparent conducting ZnO:Al films on different organic substrates deposited by r.f. sputtering
    Chen, Y
    Zhang, DH
    Wang, QP
    Ma, J
    Yang, TL
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2000, 16 (01) : 23 - 26
  • [38] Transparent Conducting ZnO:Al Films on Different Organic Substrates Deposited by r.f. Sputtering
    Yuan CHEN
    Journal of Materials Science & Technology, 2000, (01) : 23 - 26
  • [39] ZnO films deposited by RF magnetron sputtering
    Li, J
    Wu, ST
    Kang, JY
    SMIC-XIII: 2004 13th International Conference on Semiconducting & Insulating Materials, 2004, : 77 - 80
  • [40] Preparation and character of textured ZnO:Al thin films deposited on flexible substrates by RF magnetron sputtering
    Wang, Xiao-jing
    Wang, Hang
    Zhou, Wen-li
    Li, Gang-xian
    Yu, Jun
    MATERIALS LETTERS, 2011, 65 (13) : 2039 - 2042
12345