Photoluminescence from Si and Er dual-implanted Si-rich thermal oxidation SiO2/Si thin films

被引：0
|
作者：
Xiao, Zhi-Song
Xu, Fei
Zhang, Tong-He
Cheng, Guo-An
Gu, Lan-Lan
机构：
来源：
Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis | 2002年 / 22卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Radiation effect on the photoluminescence properties of Si/SiO2 thin films
    Zhong, Kun
    Xiao, Zhisong
    Cheng, Xiangqian
    Zhu, Fang
    Yan, Lu
    Zhang, Feng
    Cheng, Guoan
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (18): : 3114 - 3117
  • [42] Long lifetime and efficient emission from Er3+ ions coupled to Si nanoclusters in Si-rich SiO2 layers
    Khomenkova, L.
    Gourbilleau, F.
    Cardin, J.
    Jambois, O.
    Garrido, B.
    Rizk, R.
    JOURNAL OF LUMINESCENCE, 2009, 129 (12) : 1519 - 1523
  • [43] Characteristic photoluminescence band in Si+-implanted SiO2 grown on Si wafer
    Iwayama, TS
    Hole, DE
    Boyd, IW
    MICROELECTRONICS RELIABILITY, 2000, 40 (4-5) : 849 - 854
  • [44] Photoluminescence of Er-doped Si-SiO2 and Al-Si-SiO2 sputtered thin films
    Rozo, C.
    Fonseca, L. F.
    Jaque, D.
    Sole, J. Garcia
    JOURNAL OF LUMINESCENCE, 2008, 128 (5-6) : 897 - 900
  • [45] Sensitization of er by Si-nanoclusters in Erbium doped Si-rich Si nitride films
    Yang, Moon-Seung
    Shin, Jung H.
    Kim, Kyung Joong
    IEEE NMDC 2006: IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE 2006, PROCEEDINGS, 2006, : 532 - +
  • [46] ANNEALING CHARACTERISTICS OF SI-RICH SIO2-FILMS
    NESBIT, LA
    APPLIED PHYSICS LETTERS, 1985, 46 (01) : 38 - 40
  • [47] Photoluminescence decay dynamics of SiO2 films containing Si nanocrystals and Er
    Watanabe, K
    Takeoka, S
    Fujii, M
    Hayashi, S
    Yamamoto, K
    JOURNAL OF LUMINESCENCE, 2000, 87-9 : 426 - 428
  • [48] Influence of thermal treatment on photolummescence of Er-doped Si-rich SiO2 prepared by ion implantation
    Zhang, CS
    Sun, JZ
    Wang, X
    Zhang, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 242 (1-2): : 279 - 281
  • [49] Study of photoluminescence spectra of Si-rich SiNx films
    Liu, YZ
    Zhou, YQ
    Shi, WQ
    Zhao, LL
    Sun, BY
    Ye, TC
    MATERIALS LETTERS, 2004, 58 (19) : 2397 - 2400
  • [50] Continuously tunable photoluminescence from Si+-implanted and thermally annealed SiO2 films
    Fischer, T
    PetrovaKoch, V
    Shcheglov, K
    Brandt, MS
    Koch, F
    THIN SOLID FILMS, 1996, 276 (1-2) : 100 - 103
12345