Photoluminescence from Si and Er dual-implanted Si-rich thermal oxidation SiO2/Si thin films

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Xiao, Zhi-Song
Xu, Fei
Zhang, Tong-He
Cheng, Guo-An
Gu, Lan-Lan
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Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis | 2002年 / 22卷 / 04期
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