Influence of helium permeation in polytetrafluoroethene gasket on leak detection

被引：0
|
作者：
Liao, Bin [1 ]
Zeng, Xiangbing [1 ]
Pan, Xiaoxia [1 ]
Li, Guangdong [1 ]
Cai, Yue [1 ]
Zang, Liqing [1 ]
Wang, Qilu [1 ]
Wan, Fangmei [1 ]
机构：
[1] Institute of System Engineering, CAEP, Mianyang, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 01期
关键词：
D O I：
10.13922/j.cnki.cjovst.2015.01.13
中图分类号：
学科分类号：
摘要：
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页码：69 / 73
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