FACEPIECE-TO-FACE LEAKAGE EVALUATION USING A HELIUM LEAK DETECTION METHOD

被引：1

作者：

CYR, RR ^{[1
]}

WATKINS, DW ^{[1
]}

机构：

[1] ATO INC,SCOTT AVIAT DIV,LANCASTER,NY 14086

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568589

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：419 / 422

页数：4

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