FACEPIECE-TO-FACE LEAKAGE EVALUATION USING A HELIUM LEAK DETECTION METHOD

被引：1
|
作者：
CYR, RR [1 ]
WATKINS, DW [1 ]
机构：
[1] ATO INC,SCOTT AVIAT DIV,LANCASTER,NY 14086
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期
关键词：
D O I：
10.1116/1.568589
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：419 / 422
页数：4
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