Spray deposition of PVDF layers with application in MEMS pressure sensors

被引：2
|
作者：
Kolev, Georgi D. [1 ]
Aleksandrova, Mariya P. [1 ]
Denishev, Krassimir H. [1 ]
机构：
[1] Department of Microelectronic, Faculty of Electronic Engineering and Technologies, Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria
来源：
International Journal of Reasoning-based Intelligent Systems | 2013年 / 5卷 / 03期
关键词：
Piezoelectricity - Deposits - Pressure sensors - Polymer films - Fluorine compounds - Glass;
D O I：
10.1504/IJRIS.2013.058188
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：177 / 182
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