Spray deposition of PVDF layers with application in MEMS pressure sensors

被引：2
|
作者：
Kolev, Georgi D. [1 ]
Aleksandrova, Mariya P. [1 ]
Denishev, Krassimir H. [1 ]
机构：
[1] Department of Microelectronic, Faculty of Electronic Engineering and Technologies, Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria
来源：
International Journal of Reasoning-based Intelligent Systems | 2013年 / 5卷 / 03期
关键词：
Piezoelectricity - Deposits - Pressure sensors - Polymer films - Fluorine compounds - Glass;
D O I：
10.1504/IJRIS.2013.058188
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：177 / 182
相关论文
共 50 条
  • [21] EFFECT OF SPRAY RATE AND METHOD OF APPLICATION IN SPRAY DEPOSITION
    Barbosa, R. N.
    Griffin, J. L.
    Hollier, C. A.
    APPLIED ENGINEERING IN AGRICULTURE, 2009, 25 (02) : 181 - 184
  • [22] Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
    Gembaczka, P.
    Goertz, M.
    Celik, Y.
    Jupe, A.
    Stuehlmeyer, M.
    Goehlich, A.
    Vogt, H.
    Mokwa, W.
    Kraft, M.
    JOURNAL OF SENSORS AND SENSOR SYSTEMS, 2014, 3 (02) : 335 - 347
  • [23] Effective Sputter Deposition of thin Insulation Layers Reliable and durable Pressure Sensors in Hydrogen Technology
    不详
    VAKUUM IN FORSCHUNG UND PRAXIS, 2018, 30 (05) : 15 - 15
  • [24] Spray pyrolysis deposition of zinc oxide nanostructured layers
    Krunks, M.
    Dedova, T.
    Acik, I. Oja
    THIN SOLID FILMS, 2006, 515 (03) : 1157 - 1160
  • [25] Application of MEMS technology in automotive sensors and actuators
    Eddy, DS
    Sparks, DR
    PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1747 - 1755
  • [26] Enhanced performance of flexible Piezoelectric PVDF sensors by ultrasonic spray coating method
    Taleb, Sepide
    Badillo-Avila, Miguel A.
    Acuautla, Monica
    2021 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IEEE ISAF 2021) / INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES (ISIF) / PIEZORESPONSE FORCE MICROSCOPY WORKSHOP (PFM), 2021,
  • [27] Application of MEMS technology in automotive sensors and actuators
    Sparks, DR
    Chang, SC
    Eddy, DS
    MHS '98, PROCEEDINGS OF THE 1998 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 1998, : 9 - 15
  • [28] Characterization of polycrystalline 3C(β)-SiC thin films for MEMS and pressure sensors application
    Cavallini, A
    Rossi, M
    Cocuzza, M
    Ricciardi, C
    ASDAM 2004: THE FIFTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2004, : 25 - 28
  • [29] Flexible PVDF-BaTiO3 Nanocomposites for Pressure Sensors
    Olmos, D.
    Gonzalez-Gaitano, G.
    Vela, R.
    Cordoba, L.
    Gonzalez-Benito, J.
    Kholkin, A. L.
    2012 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS HELD JOINTLY WITH 11TH IEEE ECAPD AND IEEE PFM (ISAF/ECAPD/PFM), 2012,
  • [30] Tiny MEMS-Based Pressure Sensors in the Measurement of Intracranial Pressure
    Zhang, Yanhang
    Zhang, Zhaohua
    Pang, Bo
    Yuan, Li
    Ren, Tianling
    TSINGHUA SCIENCE AND TECHNOLOGY, 2014, 19 (02) : 161 - 167
12345