Spray deposition of PVDF layers with application in MEMS pressure sensors

被引：2
|
作者：
Kolev, Georgi D. [1 ]
Aleksandrova, Mariya P. [1 ]
Denishev, Krassimir H. [1 ]
机构：
[1] Department of Microelectronic, Faculty of Electronic Engineering and Technologies, Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria
来源：
International Journal of Reasoning-based Intelligent Systems | 2013年 / 5卷 / 03期
关键词：
Piezoelectricity - Deposits - Pressure sensors - Polymer films - Fluorine compounds - Glass;
D O I：
10.1504/IJRIS.2013.058188
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：177 / 182
相关论文
共 50 条
  • [1] Novel Designs for Application Specific MEMS Pressure Sensors
    Fragiacomo, Giulio
    Reck, Kasper
    Lorenzen, Lasse
    Thomsen, Erik V.
    SENSORS, 2010, 10 (11) : 9541 - 9563
  • [2] MEMS pressure sensors
    VTI Technologies, Finland
    Electron World, 2007, 1857 (28-30): : 28 - 30
  • [3] Mems pressure sensors
    Timonen, Heikki
    ELECTRONICS WORLD, 2007, 113 (1857): : 28 - 31
  • [4] MEMS pressure sensors for aerospace applications
    Lin, LW
    Yun, WJ
    1998 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 1, 1998, : 429 - 436
  • [5] Development of an array of pressure sensors with PVDF film
    I. Lee
    H. J. Sung
    Experiments in Fluids, 1999, 26 : 27 - 35
  • [6] Development of an array of pressure sensors with PVDF film
    Lee, I
    Sung, HI
    EXPERIMENTS IN FLUIDS, 1999, 26 (1-2) : 27 - 35
  • [7] MEMS sensors for hearing aid application
    Tang, Houwen
    Matin, M. A.
    Yi, Yun-Bo
    OPTICS AND PHOTONICS FOR INFORMATION PROCESSING, 2007, 6695
  • [8] The application of MEMS sensors in dynamic testing
    Zhai, CG
    Zhang, WD
    ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, : 15 - 17
  • [9] PZT thin film deposition techniques, properties and its application in ultrasonic MEMS sensors: a review
    Shilpa, G. D.
    Sreelakshmi, K.
    Ananthaprasad, M. G.
    INTERNATIONAL CONFERENCE ON ADVANCES IN MATERIALS AND MANUFACTURING APPLICATIONS (ICONAMMA-2016), 2016, 149
  • [10] Application of Finite Element Models for Design of High-precision MEMS Pressure Sensors
    Gridchin, V. A.
    Chebanov, M. A.
    Zinov'ev, V. B.
    Vasilyev, V. Yu.
    2014 12TH INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRONICS INSTRUMENT ENGINEERING (APEIE), 2014, : 11 - 16
12345