Contactless characterisation techniques for verification of (AlGaN/GaN) device heterostructures quality

被引:0
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作者
Paszkiewicz, R. [1 ]
Paszkiewicz, B. [1 ]
KozLowski, J. [1 ]
TLaczaLa, M. [1 ]
机构
[1] Institute of Microsystems Technology, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland
来源
| 2001年 / SAGE Publications Ltd卷 / 08期
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D O I
10.1106/152451102024664
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页码:3 / 4
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