Vibration-insensitive phase-shifting interferometry based on frequency domain analysis

被引：2
|
作者：
Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang [1 ]
621900, China
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来源：
Guangxue Jingmi Gongcheng | / 1卷 / 252-259期
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D O I：
10.3788/OPE.20152301.0252
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