Effects of femtosecond laser parameters on hole drilling of silica glass

被引：0
|
作者：
Xing, Songling [1 ]
Liu, Lei [1 ]
Zou, Guisheng [1 ]
Zhang, Xueqian [1 ]
Bai, Hailin [1 ]
Zhou, Y.N. [1 ,2 ]
机构：
[1] Ministry of Education Key Laboratory of Advanced Materials Processing, Department of Mechanical Engineering, Tsinghua University, Beijing,100084, China
[2] Department of Mechatronics and Mechanical Engineering, University of Waterloo, Waterloo,N2L 3G1, Canada
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 04期
关键词：
D O I：
10.3788/CJL201542.0403001
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Femtosecond laser drilling of high-aspect ratio microchannels in glass
    Xin Zhao
    Yung C. Shin
    Applied Physics A, 2011, 104 : 713 - 719
  • [42] Femtosecond laser drilling of high-aspect ratio microchannels in glass
    Zhao, Xin
    Shin, Yung C.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2011, 104 (02): : 713 - 719
  • [43] The Effect of Combining Femtosecond Laser and Electron Irradiation on Silica Glass
    Shchedrina, Nadezhda
    Allaoui, Roqya
    Sosa, Matilde
    Nemeth, Gergely
    Borondics, Ferenc
    Ollier, Nadege
    Lancry, Matthieu
    NANOMATERIALS, 2024, 14 (23)
  • [44] Femtosecond laser direct processing in wet and dry silica glass
    Lancry, M.
    Groothoff, N.
    Guizard, S.
    Yang, W.
    Poumellec, B.
    Kazansky, P. G.
    Canning, J.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2009, 355 (18-21) : 1057 - 1061
  • [45] Thermal annealing of femtosecond laser written structures in silica glass
    Witcher, Jonathan J.
    Reichman, Wilbur J.
    Fletcher, Luke B.
    Troy, Neil W.
    Krol, Denise M.
    OPTICAL MATERIALS EXPRESS, 2013, 3 (04): : 502 - 510
  • [46] Fabrication of volume grating induced in silica glass by femtosecond laser
    Yamada, K
    Watanabe, W
    Kintaka, K
    Nishii, J
    Itoh, K
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 474 - 477
  • [47] Lifetime prediction of nanogratings inscribed by a femtosecond laser in silica glass
    Wang, Yitao
    Lancry, Matthieu
    Cavillon, Maxime
    Poumellec, Bertrand
    OPTICS LETTERS, 2022, 47 (05) : 1242 - 1245
  • [48] Analysis of surface quality for femtosecond laser ablation silica glass
    Wu, Dongjiang
    Yao, Longyuan
    Ma, Guangyi
    Niu, Fangyong
    Guo, Dongming
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2014, 50 (23): : 194 - 199
  • [49] Hole Depth Prediction in a Femtosecond Laser Drilling Process Using Deep Learning
    Lim, Dong-Wook
    Kim, Myeongjun
    Choi, Philgong
    Yoon, Sung-June
    Lee, Hyun-Taek
    Kim, Kyunghan
    MICROMACHINES, 2023, 14 (04)
  • [50] The effect of assist liquid on the hole taper improvement in femtosecond laser percussion drilling
    Jiao, L. S.
    Ng, E. Y. K.
    Wee, L. M.
    Zheng, H. Y.
    INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN 2011), 2011, 19
12345