Effects of femtosecond laser parameters on hole drilling of silica glass

被引：0
|
作者：
Xing, Songling [1 ]
Liu, Lei [1 ]
Zou, Guisheng [1 ]
Zhang, Xueqian [1 ]
Bai, Hailin [1 ]
Zhou, Y.N. [1 ,2 ]
机构：
[1] Ministry of Education Key Laboratory of Advanced Materials Processing, Department of Mechanical Engineering, Tsinghua University, Beijing,100084, China
[2] Department of Mechatronics and Mechanical Engineering, University of Waterloo, Waterloo,N2L 3G1, Canada
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 04期
关键词：
D O I：
10.3788/CJL201542.0403001
中图分类号：
学科分类号：
摘要：
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