Simulation of proportion integration differentiation neural network control of reactive sputtering

被引：0
|
作者：
Wang, Zhenwei [1 ]
Mu, Zongxin [1 ]
Liu, Shengguang [2 ]
机构：
[1] Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
[2] School of Physics and Optoelectronic Technology of DUT, Dalian 116024, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 04期
关键词：
D O I：
10.3969/j.issn.1672-7126.2009.04.06
中图分类号：
学科分类号：
摘要：
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页码：364 / 368
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