Simulation of proportion integration differentiation neural network control of reactive sputtering

被引：0
|
作者：
Wang, Zhenwei [1 ]
Mu, Zongxin [1 ]
Liu, Shengguang [2 ]
机构：
[1] Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
[2] School of Physics and Optoelectronic Technology of DUT, Dalian 116024, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 04期
关键词：
D O I：
10.3969/j.issn.1672-7126.2009.04.06
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：364 / 368
相关论文
共 50 条
  • [11] Neural network adaptive control and simulation of road simulation system
    Bie, Hui
    Yang, Bo
    Guo, Xuexun
    Wuhan Ligong Daxue Xuebao (Jiaotong Kexue Yu Gongcheng Ban)/Journal of Wuhan University of Technology (Transportation Science and Engineering), 2007, 31 (06): : 1057 - 1060
  • [12] Mechanisms of neural differentiation and integration
    Ulrich, Henning
    Resende, Rodrigo R.
    SEMINARS IN CELL & DEVELOPMENTAL BIOLOGY, 2019, 95 : 1 - 3
  • [13] Neural network application for the secondary control of voltage and reactive power
    Kuzle, Igor
    Tesnjak, Sejid
    Plavsic, Tomislav
    Energija, 1998, 47 (02): : 133 - 140
  • [14] Neural network reactive navigation and control of wheeled mobile robot
    Hendzel, Z
    NEURAL NETWORKS AND SOFT COMPUTING, 2003, : 686 - 691
  • [15] TRIDYN simulation of target poisoning in reactive sputtering
    Rosén, D
    Katardjlev, I
    Berg, S
    Möller, W
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 228 : 193 - 197
  • [16] Immune network simulation of reactive control of a robot arm manipulator
    Meshref, H
    VanLandingham, H
    SMCIA/01: PROCEEDINGS OF THE 2001 IEEE MOUNTAIN WORKSHOP ON SOFT COMPUTING IN INDUSTRIAL APPLICATIONS, 2001, : 81 - 85
  • [17] Predictive functional control with proportion and integration structure
    Lin Xia
    Chen Zengqiang
    Sun Qinglin
    Yuan Zhuzhi
    Proceedings of the 24th Chinese Control Conference, Vols 1 and 2, 2005, : 498 - 501
  • [18] A simulation software for neural network nonlinear predictive control
    Li, X.
    Chen, Z.
    Yuan, Z.
    Xitong Fangzhen Xuebao / Journal of System Simulation, 2001, 13 (05): : 571 - 572
  • [19] Neural network simulation of cortical stimulation for seizure control
    Anderson, William S.
    Kudela, Pawel
    Franaszczuk, Piotr J.
    Bergey, Gregory K.
    EPILEPSIA, 2006, 47 : 58 - 58
  • [20] A neural network simulation of aphasic naming errors: Network dynamics and control
    Tikkala, A
    Juhola, M
    NEUROCOMPUTING, 1996, 13 (01) : 11 - 29
12345