Properties of DLC composite films prepared by PECVD and application of mold

被引：0
|
作者：
Zhang, Er-Geng [1 ]
Chen, Qiang [2 ]
机构：
[1] Institute of Surface Engineering, Shanghai Institute of Technology, Shanghai,201418, China
[2] School of Engineering Innovation, Shanghai Institute of Technology, Shanghai,201418, China
来源：
Surface Technology | 2019年 / 48卷 / 01期
关键词：
17;
D O I：
10.16490/j.cnki.issn.1001-3660.2019.01.039
中图分类号：
学科分类号：
摘要：
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页码：298 / 304
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