Properties of DLC composite films prepared by PECVD and application of mold

被引:0
|
作者
Zhang, Er-Geng [1 ]
Chen, Qiang [2 ]
机构
[1] Institute of Surface Engineering, Shanghai Institute of Technology, Shanghai,201418, China
[2] School of Engineering Innovation, Shanghai Institute of Technology, Shanghai,201418, China
来源
Surface Technology | 2019年 / 48卷 / 01期
关键词
17;
D O I
10.16490/j.cnki.issn.1001-3660.2019.01.039
中图分类号
学科分类号
摘要
引用
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页码:298 / 304
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