3D micromachining of SU-8 polymer with proton microbeam

被引：0
|
作者：
Simčič, J. [1 ]
Pelicon, P. [1 ]
Rupnik, Z. [1 ]
Mihelič, M. [1 ]
Razpet, A. [1 ]
Jenko, D. [1 ]
MačEk, M. [2 ]
机构：
[1] Jozef Stefan Institute, Jamova 39, SI-1001 Ljubljana, Slovenia
[2] Faculty of Electrical Engineering, University of Ljubljana, Trzaška 25, SI-1000 Ljubljana, Slovenia
来源：
Nucl Instrum Methods Phys Res Sect B | 1600年 / 1-4卷 / 479-485期
关键词：
Compendex;
D O I：
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学科分类号：
摘要：
Deposition - Dosimetry - Irradiation - Microstructure - Polymers - Proton beams - Protons - Scanning electron microscopy - Three dimensional - Throughput
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