3D micromachining of SU-8 polymer with proton microbeam

被引：0
|
作者：
Simčič, J. [1 ]
Pelicon, P. [1 ]
Rupnik, Z. [1 ]
Mihelič, M. [1 ]
Razpet, A. [1 ]
Jenko, D. [1 ]
MačEk, M. [2 ]
机构：
[1] Jozef Stefan Institute, Jamova 39, SI-1001 Ljubljana, Slovenia
[2] Faculty of Electrical Engineering, University of Ljubljana, Trzaška 25, SI-1000 Ljubljana, Slovenia
来源：
Nucl Instrum Methods Phys Res Sect B | 1600年 / 1-4卷 / 479-485期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Deposition - Dosimetry - Irradiation - Microstructure - Polymers - Proton beams - Protons - Scanning electron microscopy - Three dimensional - Throughput
引用
收藏
相关论文
共 50 条
  • [21] Polydimethylglutarimide (PMGI) as a sacrificial material for SU-8 surface-micromachining
    Foulds, I. G.
    Johnstone, R. W.
    Parameswaran, M.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (07)
  • [22] Submillimetre Rectangular Waveguides Based on SU-8 Photoresist Micromachining Technology
    Glynn, David
    He, Tianhao
    Powell, Jeff
    Tian, Yingtao
    Shang, Xiaobang
    Lancaster, Michael J.
    2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2016, : 417 - 420
  • [23] Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining
    Ghantasala, MK
    Hayes, JP
    Harvey, EC
    Sood, DK
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (02) : 133 - 139
  • [24] A Micro Pressure Sensor with SU-8 Polymer
    Zhu, Xiaohong
    Yin, Yonghua
    Zheng, Xiaohu
    PROCEEDINGS OF THE 2015 INTERNATIONAL CONFERENCE ON APPLIED MECHANICS, MECHATRONICS AND INTELLIGENT SYSTEMS (AMMIS2015), 2016, : 299 - 304
  • [25] Microfabricated 3-D polymeric structure with SU-8
    Yi, Shin Wook
    Kong, Hong Jin
    MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS V AND MICROFABRICATION PROCESS TECHNOLOGY XII, 2007, 6462
  • [26] 3D hydrogen profiling using a proton microbeam
    Dujmic, D
    Jaksic, M
    Soic, N
    Tadic, T
    Bogdanovic, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 111 (1-2): : 126 - 132
  • [27] Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles
    Tao, Sarah L.
    Popat, Ketul
    Desai, Tejal A.
    NATURE PROTOCOLS, 2006, 1 (06) : 3153 - 3158
  • [28] Off-wafer fabrication and surface modification of asymmetric 3D SU-8 microparticles
    Sarah L Tao
    Ketul Popat
    Tejal A Desai
    Nature Protocols, 2006, 1 : 3153 - 3158
  • [29] SU-8 based microdevices to study self-induced chemotaxis in 3D microenvironments
    Ayuso, Jose Maria
    Mongel, Rosa
    Llamazares, Guillermo A.
    Moreno, Marco
    Agirregabiria, Maria
    Bergamo, Javier
    Doblare, Manuel
    Ochoa, Lnaki
    Fernandez, Luis J.
    FRONTIERS IN MATERIALS, 2015, 2
  • [30] Bimetallic thin film grayscale photomasks for complex 3D microstructure creation in SU-8
    Wang, Jun
    Dykes, James M.
    Choo, Chinheng
    Poon, David K.
    Chang, Marian
    Tsui, Jimmy T. K.
    Chapman, Glenn H.
    2007 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-3, 2007, : 959 - 962
12345