The application of atomic force microscope for roughness measurement

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作者：
Center for Measurement Standards, ITRI, Bldg. 16, 321 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan [1 ]
机构：
来源：
Proc. of the 2nd Internat. Symp. on Instrument. Sc. and Technol. | 1600年 / 2/044-2/045期
关键词：
Compendex;
D O I：
Proceedings of the second International Symposium on Instrumentation Science and Technology
中图分类号：
学科分类号：
摘要：
Algorithms - Atomic force microscopy - Calculations - Computer software - Digital instruments - Standards - Statistical methods - Surface roughness
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